OLED 증착 마스크 표면의 증착 Source 및 유기물 세정 장치로, FMM(Fine Metal Mask) Cleaning, OMM(Open Metal Mask) Cleaning, High quality & efficiency OLED Mask Cleaning이 가능하다.

Feature

• 1. 2G, 4.5G, 5.5.G, 6G, 8G
• 2. FMM (Fine Metal Mask) Cleaning, OMM(Open Metal Mask) Cleaning
• 3. High-quality, High efficiency OLED Mask Cleaning
• - Reduced running cost of chemical and DIW
• - Improved organic / cathode cleaning performance
• - Optimized cleaning for high resolution FMM/OMM
• - Auto macro inspection and image saving
• - Free from environment safety and health regulations
• - Expanded eco-friendly solution
• - VVD(Vacuum Vapor Dryer)

ONE STOP TOTAL SOLUTION

• - Initial Mask Cleaning
• - Organic Mask Cleaning
• - TFE Mask Cleaning
• - Cathode Mask Cleaning